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Microenvironments Studied for Next-Generation Suitability

机译:研究下一代适应性的微环境

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摘要

Permeability, diffusion and solubility coefficients of oxygen gas and water vapor were measured for PC at 25℃. With similar molecular size, oxygen and water had similar diffusivity. However, water has a much greater affinity than oxygen does for PC, so water exhibited a faster permeation rate.rnThese inherent material properties were used to estimate the performance of an ME constructed from PC. Calculations gave realistic estimates of drying times in vacuum, breakthrough times, permeation rates and post-purge RH rise due to desorption from the ME materials of construction.
机译:在25℃下测定了PC的氧气和水蒸气的渗透率,扩散系数和溶解度系数。具有相似的分子大小,氧气和水具有相似的扩散率。然而,水对氧气的亲和力比氧气对PC的亲和力大得多,因此水的渗透速率更快。这些固有的材料特性被用来评估PC制成的ME的性能。计算结果给出了在真空中干燥时间,穿透时间,渗透率和吹扫后相对湿度的实际估计值,这是由于从结构ME材料中脱附所致。

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  • 来源
    《Semiconductor International》 |2009年第12期|16-1820-21|共5页
  • 作者单位

    Entegris Inc., Chaska, Minn;

    Entegris Inc., Chaska, Minn;

    Entegris Inc., Chaska, Minn;

    Entegris Inc., Chaska, Minn;

    Entegris Inc., Chaska, Minn;

  • 收录信息 美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

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