Design and optimization of voice coil actuator for six degree of freedom active vibration isolation system using Halbach magnet array

摘要

This paper describes the design, modeling, optimization, and validation of an active vibration isolation system using a voice coil motor. The active vibration isolating method was constructed with a passive isolator and an active isolator. A spring was used for passive isolating; an actuator was used for active isolating. The proposed active vibration isolation system (AVIS) can isolate disturbances for many kinds of instruments. Until now, developed AVIS were able to isolate a six degree-of-freedom disturbance effectively. This paper proposes the realization of such a six degree-of-freedom active vibration isolation system that can work as a bench top device for precision measuring machines such as atomic force microscope, scanning probe microscope, etc.