CONDITIONING DEVICE AND CORRESPONDING OBJECT HANDLER, STAGE APPARATUS AND LITHOGRAPHIC APPARATUS

摘要

Conditioning device for conditioning an object in a conditioning volume, comprising: at least one support pin adapted to support the object; a firs! plate and a second plate forming outer hordes of the conditioning volume; an actuator unit adapted to move at least one of the first plate and the second plate between: an object receiving position in which the first plate and second plate are separated by a receiving distance of each other and the object can be arranged into the conditioning volume; and an object conditioning position in which the first plate and second plate arc separated by a conditioning distance of each other which is smaller than the receiving distance, wherein a seal is formed between the first plate and the second plate in the object conditioning position, wherein the seal forms an outer border of the conditioning volume.