Variability In Measurements Of Micro Lengths With A White Light Interferometer

摘要

The effect of the discretionary set-up parameters scan length and initial scanner position on the measurements of length performed with a white light interferometer microscope was investigated. In both analyses, two reference materials of nominal lengths 40 and 200 μm were considered. Random effects and mixed effects models were fitted to the data from two separate experiments. Punctual and interval estimates of variance components were provided.