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The two wavelengths white light interference method and the interferometer for each measurement step of another metal material
The two wavelengths white light interference method and the interferometer for each measurement step of another metal material
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机译:另一种金属材料的每个测量步骤的两种波长白光干涉法和干涉仪
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摘要
This invention is on a measurement method and apparatus for measuring the accurate height of a very small step composed of two different flat materials. In this method, two wavelength-white light interferometry is used and the measuring error caused by the change in phase difference by two materials is compensated by a unique equation.
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