セグメント構造ダイヤモンド状炭素膜を摩擦駆動面に用いた弾性表面波リニアモータ（第3報）: 犠牲層を用いたS-DLC膜の生成方法と駆動実験

摘要

A surface acoustic wave (SAW) linear motor is a kind of ultrasonic motors. The advantages of the SAW linear motor are thin structure, large output force, high speed, precise positioning and so on. On the other hand, the motor has a problem with wear of contact surface. The SAW linear motor consists of a LiNO_3 substrate as a stator transducer and a silicon substrate with distributed projections as a slider. The stator transducer material, however, is easily worn due to friction drive. Moreover the silicon projections may enhance the wearing. Lifetime of the motor is reduced by the wear of the stator. To solve this problem, previously, segment-structured diamond-like carbon (S-DLC) films have been applied to the stator transducer surface. Enough driving performance has not been observed yet by the stator with the S-DLC films. The reason of this problem was edge shape of segments of the S-DLC films. In this report, we propose a new preparation method to fabricate the S-DLC films with round edge. Trial fabrication of the structure, abrasion test for the driving surface and driving characteristic with the stator are also reported.%近年，半導体産業や産業用ロボットなどの発達にともない，高性能アクチュエータの開発が求められている．超音波モータは取り出せる推力が大きい，保持九保持トルクが大きい，磁場を発生しないなど様々な特長を有したアクチュエータであり，真空状態などの特殊環境下での利用が見込まれている．その超音波モータの中でも超音波振動のー種である弾性表面波（surface acousdc wave：SAW）を利用したモータの開発が行われている．