Nanoscale Energy-Filtered Scanning Confocal Electron Microscopy Using a Double-Aberration-Corrected Transmission Electron Microscope

摘要

We demonstrate that a transmission electron microscope fitted with two spherical-aberration correctorsncan be operated as an energy-filtered scanning confocal electron microscope. A method for establishingnthis mode is described and initial results showing 3D chemical mapping with nanoscale sensitivity tonheight and thickness changes in a carbon film are presented. Importantly, uncorrected chromaticnaberration does not limit the depth resolution of this technique and moreover performs an energy-filteringnrole, which is explained in terms of a combined depth and energy-loss response function.