A method for simultaneously measuring 6DOF geometric motion errors of a precision rotary stage based on absolute position-distance measurement

摘要

In this paper, an absolute position-distance measurement based method for simultaneous measurement of six-degree-of-freedom (6DOF) errors of a precision rotary stage is proposed. This method uses the multi-wavelength phase-shifting interferometry technology and high-speed CCD camera to measure the instantaneous absolute spatial posture of the specially designed micro structure feature following the movement of a measured rotary stage. By analyzing the spatial posture of a series of instantaneous micro structure features, the 6DOF errors of the precision rotary stage are separated. The simultaneous, high precision and dynamically continuous measurement of 6DOF errors of the precision rotary stage is achieved. To improve the accuracy of error analysis, a model of 6DOF errors of the precision rotary stage is established to determine the mapping relationship between the 6DOF errors and the spatial posture of the micro structure feature. A test platform for 6DOF geometric motion errors of the precision rotary stage is built. The measurement results demonstrate the effectiveness and accuracy of the proposed method.