ERROR MEASUREMENT METHOD OF AN ULTRA-PRECISION LINEAR STAGE AND AN ERROR MEASURING DEVICE THEREFOR CAPABLE OF INDIRECTLY VERIFYING THE PRECISION OF MEASUREMENT BY COMPARING THE ROLL ERRORS

摘要

PURPOSE: An error measurement method of an ultra-precision linear stage and an error measuring device therefore are provided to conveniently calculate the 5-DOF(Degrees Of Freedom) motion errors by using the measured formation error of the reference surface through the measurement of 2 times.;CONSTITUTION: An error measurement method of an ultra-precision linear stage comprises the following steps. The measured value of each sensor including some of errors is measured by a plurality of sensors. A plurality of sensors is arranged to the reference surface of the straight edge(40) aligned in parallel to an x-axis. Errors are calculated by using the measured value. A plurality of sensors comprises sensors(31a, 31b, 31c) located in each vertex of triangle.;COPYRIGHT KIPO 2012