Scattering of Laser Radiation by the Rough Surface of a Planar Dielectric Waveguide

摘要

The scattering problem for the TE mode scattered by the rough surface of a film optical waveguide is solved. Expressions for the angular distribution of the power scattered into the media adjoining the guiding layer of this waveguide are obtained. Angular ranges in which this distribution has a pronounced oscillatory character are found. It is shown that the method for determining the roughness characteristics from the waveguide scattering allows measurement of the amplitudes of spatial harmonics describing the surface roughness of an order of several picometers with the use of available sources and receivers of laser radiation.