Transparent Conductive ITO/Ag/ITO Multilayer Films Prepared by Low Temperature Process and Physical Properties

摘要

Transparent conductive ITO/Ag/ITO multilayer thin films were successfully deposited on polyethylene terephthalate (PET) substrates by RF sputtering of ITO layer and DC sputtering of Ag layer at room temperature. Electrical and optical properties of ITO/Ag/ITO multilayer films were strongly dependent on the thickness of Ag thin interlayer. The ITO (50 nm)/Ag (17 nm)/ITO (50 nm) multilayer films deposited on PET substrates exhibited lowest sheet resistance (6.7 Ω/□) and highest transmittance (83.2% at 550 nm). Especially, the sheet resistance of ITO/Ag/ITO multilayer films was superior to those of the commercial ITO (150 nm) films deposited on rigid glass substrates at high temperature. The ITO/Ag/ITO multilayer films coated PET substrate could be a good candidate for application to a transparent conductive oxide (TCO) electrode material for large size flexible OLED devices.