机译:一种主动塑性变形方法,用于制造后基于金属的MEMS器件的微调
School of Electrical Engineering, Korea Advanced Institute of Science and Technology, Daejeon, South Korea;
School of Electrical Engineering, Korea Advanced Institute of Science and Technology, Daejeon, South Korea;
School of Electrical Engineering, Korea Advanced Institute of Science and Technology, Daejeon, South Korea;
School of Electrical Engineering, Korea Advanced Institute of Science and Technology, Daejeon, South Korea;
Deformation; Plastics; Micromechanical devices; Stress; Fabrication;
机译:MEMS器件制造中牺牲层释放的新方法
机译:凹痕回流密封(IRS)技术-一种用于MEMS器件的密封腔的制造方法
机译:通过制造方法和操作环境对电容MEMS器件进行边界调节
机译:基于MEMS执行器的电热微器件的设计,制造和表征。
机译:通过冷塑形变形工艺和变形后退火的Zn-Ag-Mg合金中机械性能微调
机译:通过直接在钛基板上沉积Pb(Zr,Ti)O-3薄膜来简单制造金属基压电MEMS