Reversible Light and Air-Driven Lithography by Singlet Oxygen

摘要

Tremendous work has been devoted to the design of micrometer-scale structures with applications ranging from electronic devices to bioassay arrays.Among the techniques employed,photolithography offers cheap and easily accessible equipment,where the structure originates from a prefabricated master.As the exposed areas can undergo a broad range of chemical transformations,encompassing fragmentation,cross-linking,and photooxidations,the pattern motif,in general,is formed irreversibly as the material loses initial structural features.