Numerical simulation of Cz crystal growth in rotating magnetic field with crystal and crucible rotations

摘要

Three-dimensional numerical simulations were carried out to analyze the effect of crystal and crucible rotating directions on heat and oxygen transport in Czochralski crystal growth system under rotating magnetic field. A low-Reynolds number k-e model was used for the description of the turbulent processes. The computational results show that when rotations of crystal, melt and crucible are in the same direction, the oxygen concentration in the melt is the lowest and a low concentration crystal can be obtained. Under rotating magnetic field, the heat transport is dominated by lorentz force induced streaming field and the influence of crystal and crucible rotations on heat transport is weak. Moreover, the effect of crystal rotation on the melt turbulent flow and oxygen transport is stronger than that of crucible.