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An investigation on the effect of porosity on the transport properties of porous silicon

机译:孔隙率对多孔硅传输性能影响的研究

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Microelectronics technology today is dominated exclusively by Silicon (Si). The inefficiency of Si to emit light even at cryogenic temperatures has been overcome with the discovery of porous silicon (PS) and its visible luminescence at room temperature. The present investigation aims at analysing the effect of increasing porosity on the transport properties of porous silicon with reference to field and temperature-dependent dark and photo conductivity and further substantiating the results with modulation techniques. Pure Silicon wafer of n-type was made porous by immersion in an appropriate etchant for a few minutes. The conductivity was found to increase as porosity increased and this effect could be attributed to the increase in the trap levels, with increasing porosity. Temperature-dependent studies reveal a decrease in activation energy with increase in porosity indicating an increase in conductivity. Reflectance and electroreflectance measurements were used to calculate the band gap of porous silicon. It was found to lie closer to the direct band gap of silicon. A reduction in the band gap of porous silicon has been observed.
机译:今天的微电子技术仅由硅(Si)主导。通过发现多孔硅(PS)及其在室温下的可见光,已经克服了硅即使在低温下也不能发光的问题。本研究的目的是参考与场和温度有关的暗和光导率,分析增加孔隙率对多孔硅的传输性能的影响,并通过调制技术进一步证实结果。通过将其浸入适当的蚀刻剂中几分钟,从而使n型纯硅晶片具有多孔性。发现电导率随孔隙度的增加而增加,并且这种影响可以归因于阱水平的增加,孔隙度也随之增加。温度相关的研究表明,随着孔隙度的增加,活化能降低,表明电导率增加。反射率和电反射率测量用于计算多孔硅的带隙。发现它更靠近硅的直接带隙。已经观察到多孔硅的带隙减小。

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