Hydrogen sensing properties of multi-walled carbon nanotube films sputtered by Pd

摘要

Multi-Walled Carbon nanotube (MWCNTs) films were obtained by Thermal Chemical Vapor Deposition method and coated by palladium sputtering process. Raman spectroscopy was used to study alteration in quality of the carbon nanotubes after the sputtering process. Fourier Transform Infra Red (FTIR) spectroscopy showed that hydrogenation process can reduce the C=O to C-O and also produce O-H bond. Furthermore, the electrical resistance measurement for Pd/MWNTs films was performed in a chamber with 1% hydrogen gas in a constant dry air flow. Hydrogen sensing behavior of the films was investigated at 50 ℃. Pd/MWCNTs films presented an irreversible gas response to hydrogen in the first cycle of gas exposure due to chemically adsorption of the gas. Finally, the effect of hydrogen-sample reaction on electrical conduction was presented.