Novel-Functional Single-Electron Devices Using Silicon Nanodot Array

摘要

We demonstrate a highly functional Si nanodot array device that operates by means of single-electron effects. The device features many input gates, and many outputs can be attached. A nanodot array device with three input gates and two output terminals was fabricated on a silicon-on-insulator wafer using conventional Si MOS processes. Its feasibility was demonstrated by its operation as both a half adder and a full adder when the operation voltage was carefully selected.