Fabrication of BioInspired Inorganic Nanocilia Sensors

摘要

In nature, microscale hair-like projections called cilia are used ubiquitously for both sensing and motility. In this paper, biomimetic nanoscale cilia arrays have been fabricated through templated growth of Co in anodized aluminum oxide. The motion of arrays of Co cilia was then detected using magnetic sensors. These signals were used to prove the feasibility of two types of sensors: flow sensors and vibration sensors. The flow sensors were tested in a microfluidic channel. They showed the ability to detect flows from 0.5 ml/min to 6 ml/min with a signal to noise (SNR) of 44 using only 140 $mu{hbox {W}}$ of power and no amplification. The vibration sensors were tested using a shake table in the low earthquake-like frequency range of 1–5 Hz. The vibration response was a mW signal at twice the frequency of the shake table.