High Aspect Ratio Magnetoimpedance Sensors Fabricated by Micromolding

摘要

Multilayered magnetoimpedance sensors have been fabricated using micromolding of NiFe and Cu films with thicknesses up to m. The influence of a transverse field annealing has been studied. Variation of of 170% and sensitivity of 4.4%/Oe have been obtained for a m wide and 20 m thick sensor at frequencies in the range of 1 MHz. Using the resonance between the sensor and an external capacitance, sensitivity of has been reached at high frequencies.