Changes in Particle Removal Efficiency of Filters in High Temperature IPA

摘要

The evaluation of 10-nm-rated and 5-nm-rated SM-PTFE membrane filters with 10 nm ZrO2 particles in RT IPA showed sufficiently high PRE (> 99%). In contrast, PRE of the 10-nm-rated filter slightly deteriorated at 70℃ compared to that at RT, while the 5-nm-rated filter maintained high efficiency at 70℃. Considering the PRE evaluation results in the past [3,5] and the current study, filters' PRE tends to deteriorate in high temperature chemicals. The degree of decrease depends on the chemical, temperature and filter employed. The testing of filters under actual application conditions is a necessary step in determining the appropriate filtration solution for a particular process. As was shown, depending solely on the standard RT data can lead to providing solutions that do not meet the needs of the application.