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Characterization of the junction capacitance in metal-semiconductor interface states

机译:金属-半导体界面状态下结电容的表征

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In this study, the Cu/p-Si Schottky contacts were fabricated in the condensed matter physics Research Laboratory of Physics Department of Yuzuncu Yil University. The contacts were named as diode 1, diode 2, diode 3 and diode 4 diodes. The current-voltage (I-V), capacitance voltage (C-V) and capacitance-frequency (C-f) measurements of the samples were carried out in the same laboratory mentioned above in the dark and ambient temperature. The values of the ideality factor (n) and barrier height were calculated by using forward bias I-V characteristics. To check the accuracy of the calculated values the calculations were repeated by using Cheung's Functions. In addition, the values of the series resistance were also estimated by using Cheungs' Functions. The situation that the values of the ideality factor (n) were determined as to be greater than 1 was attributed interface layer and interface states. From the C-f plots, the capacitance values decrease with increasing frequency was observed. At the low frequencies, high capacitance values observed from C-f plots point out excess capacitance resulted from interface states. On the other hand, at the high frequencies, low capacitance values observed from C-f plots can be attributed the interface states cannot follow ac signals at high frequencies.
机译:在这项研究中,Cu / p-Si肖特基接触是在Yuzuncu Yil大学物理系的凝聚态物理研究实验室中制造的。触点被命名为二极管1,二极管2,二极管3和二极管4二极管。样品的电流-电压(I-V),电容电压(C-V)和电容频率(C-f)测​​量是在上述相同的实验室中在黑暗和环境温度下进行的。理想因数(n)和势垒高度的值是通过使用正向偏压I-V特性来计算的。为了检查计算值的准确性,使用“张氏函数”重复了计算。另外,还使用Cheungs函数估算了串联电阻的值。确定理想因子(n)的值大于1的情况归因于界面层和界面状态。从C-f图可观察到电容值随频率增加而减小。在低频下,从C-f图观察到的高电容值指出界面状态导致的过大电容。另一方面,在高频下,从C-f图观察到的低电容值可以归因于界面状态不能跟随高频下的交流信号。

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