Litho unmasked on the desktop

摘要

Hancock, N.H. -A full, production version of a desktop photolithographic system with a footprint of only 4 x 4 feet is rolling out at a scaled-down price of between $100,000 and $300,000. The centerpiece of the system from Intelligent Micro Patterning LLC is a micromirror-based optical projection scheme that defines patterns directly on photoresist without requiring a photomask. The production version, a follow-up to the company's current system, is used for prototyping work and lends itself to fabricating microelectro-mechanical systems.