Investigation of boron and yttrium doping effect on structural, electrical and optical properties of sol-gel spin coated SnO₂ thin films

摘要

In this study, B and Y doped SnO2 thin films were prepared by sol-gel spin coatingmethod. The structural, electrical and optical properties of doped SnO2 were investigatedas a function of B and Y doping content. From XRD analysis, it was seen that the filmshad hetero-phase structure with cubic, orthorhombic, tetragonal and (111) cubic phase wasthe most striking phase for B and Y doped films, except for 7 at. % Y doped SnO2 films. Itwas seen from electrical measurement that sheet resistance values increased with B and Ydoping content. The optical properties of films were extensively investigated as a functionof B and Y doping content. And it was found that the optical transmittance, reflectance,extinction coefficient, refractive index, band gap and Urbach energy values depended on Band Y doping concentration. Also, it was observed that B doped films had the betterstructural, electrical and optical properties than Y doped films.