The study of electro-optical properties of nanocomposite ITO thin films prepared by e-beam evaporation

摘要

Indium-tin oxide thin films are deposited on sods lime glass substrates using e-beam evaporation system. In order to improve the structural, electrical and optical properties of the films, these films were annealed in vacuum and different temperature. The structure, sheet resistance and optical transmission of the films were systematically investigated as function of post annealing temperature. It has been observed that the films take its maximum transmission and conductivity at annealing temperature 400? C. The XRD and AFM analysis reveals that the amorphous films were oriented to 222 crystal texture direction with size of grains about 35-40 nm.