Kinetics of electrons and neutral particles in radio-frequency transformer coupled plasma H? ion source at Seoul National University

摘要

In volume production H? ion sources, control of electron temperature is essential due to its close correlation with the generation of vibrationally-excited hydrogen molecules in the driver region as well as the generation of H? ions by dissociative attachment in the extraction region. In the ion source group at Seoul National University (SNU) in Korea, a lot of research effort has been made to the development of a volume production H? ion source based on radio-frequency (RF) transformer-coupled plasma (TCP) for long lifetime continuous wave (CW) operation. It has a spiral RF antenna located outside the discharge chamber to generate a plasma with high electron temperature in the driver region and employs a magnetic filter field to prevent high energy electrons from being transported to the extraction region. In this paper, we present the recent progress on understanding of the underlying physics of the RF TCP H? ion source at SNU. Special attention is paid to the characterization of electron kinetics regime for controlling electron energy distribution and the influence of relaxation of neutral particles during the transport across the magnetic filter region. Effect of the degree of dissociation on the production of H? ions is also discussed.