超音速フリージェットPVDによる膜の特性に及ぼす超音速ノズル長さの影響

摘要

Supersonic Free Jet Physical Vapor Deposition (SFJ-PVD) is a new coating method in which a coating film is formed by depositing nanoparticles, carried by supersonic inert gas flow. One of the most important technologies of the method for obtaining high quality coating film is a supersonic nozzle (a de Laval nozzle) for accelerating inert gas velocity to supersonic. In this study, we investigated the effect of the nozzle length on the quality of aluminum film formed with SFJ-PVD by observing the section of coated substrates and three-point bending test. In conclusion, we obtained the appropriate length of the nozzle for obtaining high quality film and interface between the film and the base metal.%近年，機器の高機能?高性能化を目指すため材料の特性向上が求められている．材料は，耐食性，耐熱性，耐摩耗性，強度，靭性など複数の特性を同時に満たすことが要求されているが，単一の材料で複数の要求を満たすことは限界に近づいている．