机译:低压EBL制备3-D纳米结构
Department of Nano Science and Technology, Pusan National University, Republic of Korea;
Department of Nano-Mechankal Systems, Korea Institute of Machinery and Materials, Republic of Korea;
Department of Cogno-Mechatronics Engineering, Pusan National University, Republic of Korea;
Department of Nano-Mechankal Systems, Korea Institute of Machinery and Materials, Republic of Korea;
Department of Nano-Mechankal Systems, Korea Institute of Machinery and Materials, Republic of Korea;
Department of Cogno-Mechatronics Engineering, Pusan National University, Republic of Korea;
Three-dimensional (3-D) nano structure; Electron beam lithography; Low voltage; Nano imprint lithography (NIL); PDMS;
机译:使用软电子束光刻技术(soft-eBL)在易碎基板上定向制备陶瓷纳米结构
机译:纳米结构对硅表面的纳米结构制造机理的电场增强3-D有限元计算局部阳极氧化
机译:纳米结构对硅表面的纳米结构制造机理的电场增强3-D有限元计算局部阳极氧化
机译:ER掺杂为{sub} 2s {sub} 3 3-d直接激光制造3-d纳米结构的光致抗蚀剂
机译:由低折射率和可调折射率材料制成的光学涂层的设计,制造和表征。
机译:使用EBL制备的纳米结构底物的生物分子的表面增强拉曼光谱检测
机译:Jm3字母用单步工艺在si中制造多项式3-D纳米结构