Photolithography is an expensive and significant step in microfabrication. Approaches that could change lithography would create an impact on semiconductor industry and microelectromechanical systems technologies. We demonstrate a direct etching method by ejecting etchant droplets at desired locations by using microdroplet ejector arrays. This method could be used for easy fabrication of poly(dimethylsiloxane) microfluidic channels and nanometer height postlike structures in microfluidic channels.
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Harvard Medical School, BioMEMS Resource Center, Center for Engineering in Medicine, and Massachusetts General Hospital, 114 16th St. Room 1239, Charlestown, Massachusetts 02129-4404;