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Ion beam irradiated channel waveguides in Er~(3+)-doped tellurite glass

机译:掺Er〜(3+)碲酸盐玻璃中的离子束辐照通道波导

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摘要

Erbium-doped tellurite glasses are of great interest for the fabrication of active integrated circuits because of their unique properties in terms of bandwidth and rare earth solubility. The fabrication of multimode channel waveguides in a glass of this family, namely, a sodium-tungsten-tellurite glass, is demonstrated using a high-energy ion beam irradiation technique. Nitrogen ions with dose of 1.0 x 10~(16) ions/cm~2 and 1.5 MeV energy were used for this aim. The waveguiding effect was investigated using the end-fire coupling technique.
机译:掺杂的碲酸盐玻璃因其在带宽和稀土溶解度方面的独特性能而对于有源集成电路的制造非常感兴趣。使用高能离子束辐照技术证明了在该族玻璃(即钠钨-碲玻璃)中制造多模通道波导。为此目的,使用剂量为1.0 x 10〜(16)离子/ cm〜2的氮离子和1.5 MeV的能量。使用端射耦合技术研究了波导效应。

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