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机译:AIN基薄膜体声波谐振器的可见光响应
Institute of Microelectronics, Tsinghua University, Beijing 100084, China,Department of Electronic and Computer Engineering, Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong;
Institute of Microelectronics, Tsinghua University, Beijing 100084, China;
Institute of Microelectronics, Tsinghua University, Beijing 100084, China;
Institute of Microelectronics, Tsinghua University, Beijing 100084, China;
Institute of Microelectronics, Tsinghua University, Beijing 100084, China;
Department of Electronic and Computer Engineering, Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong;
Department of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China;
Department of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China;
Department of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China;
Center for Nanostructures, Santa Clara University, Santa Clara, California 95053, USA;
机译:AlN基薄膜体声波谐振器的可见光响应
机译:使用Mo和TI电极制备集成的基于AIN的薄膜本体声波谐振器的高纹理AIN膜
机译:基于AIN的薄膜体声波谐振器检测各种自组装单分子层
机译:频率温度系数低的基于AIN的混合体声波谐振器研究
机译:基于MEMS的系统,用于使用薄膜体声波谐振器和IR / UV光学判别进行粒子暴露评估。
机译:散装声波谐振器的材料设计和特性:综述
机译:界面粗糙度对可调薄膜体声波谐振器声损耗的影响
机译:微型薄膜BaW(体声波)谐振器及滤波技术的发展进展。