Optical and electrical performance of thermochromic V_2O_3 thin film fabricated by magnetron sputtering

摘要

V_2O_3 was recognized as one of the clearest examples of Mott-Hubbard physics but was rarely treated as transmittance modulating coatings based on the metal-insulator transition. Here, we deposited high quality epitaxial V_2O_3 thin films on sapphire (001) substrates as well as polycrystalline V_2O_3 films on glass or Si substrates, measured the optical properties during cooling and heating, and discussed the modulating ability using fully reversible optical hysteresis loops. Meanwhile, we also optimized the electrical performance of V_2O_3/SiN_x/Si samples by W-Ti co-doping. The obtained co-doped V_2O_3 film shows a relatively high temperature coefficient resistance of -8.1%/K at 80 K without hysteresis loops, which exhibits great potential in high sensitivity thermal resistor devices. Our work provides a comprehensive scenario of the V_2O_3 thin film physics.