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机译:通过热氧化和氢退火的结合提高轻掺杂Al的p型4H-SiC外延层中的载流子寿命
Department of Electronics Science and Engineering, Kyoto University, Kyoto 615-8510, Japan;
Central Research Institute of Electric Power Industry (CRIEPI), Yokosuka, Kanagawa 240-0196, Japan;
Central Research Institute of Electric Power Industry (CRIEPI), Yokosuka, Kanagawa 240-0196, Japan;
Department of Electronics Science and Engineering, Kyoto University, Kyoto 615-8510, Japan;
Department of Electronics Science and Engineering, Kyoto University, Kyoto 615-8510, Japan;
机译:通过氢钝化改善高掺杂p型4H-SiC外延层中载流子寿命
机译:通过后生长过程和表面钝化来增强轻掺杂的P型4H-SiC外延层的载体寿命
机译:温度和注入水平的依赖性以及热氧化对p型和n型4H-SiC外延层中载流子寿命的影响
机译:通过多次热氧化和退火改善4H-SiC厚外延层中少数载流子的寿命
机译:载流子寿命测量,用于表征超净p / p +硅外延薄层。
机译:在不同的注入后退火后p型铝注入的4H-SiC层上的欧姆接触
机译:温度和注入水平的依赖性以及热氧化对p型和n型4H-SiC外延层中载流子寿命的影响
机译:n( - )4H-siC外延层主要寿命限制缺陷的识别和载流子动力学