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Characterization of a self-calibrating high-precision stacked-stage vertical dual-axis goniometer

机译:自校准高精度堆叠式垂直双轴测角仪的特性

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摘要

We present details on the alignment and calibration of a goniometer assembly consisting two stacked, optically encoded, vertical axis rotation stages. A technique for its calibration is presented that utilizes a stable, uncalibrated, third stage to position a mirror in conjunction with a nulling autocollimator. Such a system provides a self-calibrating set of angular stages with absolute accuracy of ±0.1 second of plane angle (k=2 expanded uncertainty) around the full circle, suitable for laboratory application. This calibration technique permits in situ, absolute angular calibration of an operational goniometer assembly that is requisite for fully traceable angle measurement, as the installation of the encoder is known to change its performance from the angular calibration data provided by the manufacturer.
机译:我们介绍了由两个堆叠的光学编码的垂直轴旋转台组成的测角仪组件的对准和校准的详细信息。提出了一种用于校准的技术,该技术利用稳定的,未经校准的第三级结合归零自动准直仪来定位反射镜。这样的系统可提供一组自校准的角度级,其绝对精度为整个圆周围平面角的±0.1秒(k = 2扩展不确定度),适用于实验室应用。由于已知编码器的安装会根据制造商提供的角度校准数据来改变其性能,因此该校准技术可对可测角仪组件进行就地绝对角度校准,这对于完全可追溯的角度测量是必不可少的。

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