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In situ preparation electrical and surface analytical characterization of pentacene thin film transistors

机译:并五苯薄膜晶体管的原位制备电学和表面分析表征

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摘要

The fabrication of organic thin film transistors with highly reproducible characteristics presents a very challenging task. We have prepared and analyzed model pentacene thin film transistors under ultra-high vacuum conditions, employing surface analytical tools and methods. Intentionally contaminating the gold contacts and SiO2 channel area with carbon through repeated adsorption, dissociation, and desorption of pentacene proved to be very advantageous in the creation of devices with stable and reproducible parameters. We mainly focused on the device properties, such as mobility and threshold voltage, as a function of film morphology and preparation temperature. At 300 K, pentacene displays Stranski-Krastanov growth, whereas at 200 K fine-grained, layer-like film growth takes place, which predominantly influences the threshold voltage. Temperature dependent mobility measurements demonstrate good agreement with the established multiple trapping and release model, which in turn indicates a predominant concentration of shallow traps in the crystal grains and at the oxide-semiconductor interface. Mobility and threshold voltage measurements as a function of coverage reveal that up to four full monolayers contribute to the overall charge transport. A significant influence on the effective mobility also stems from the access resistance at the gold contact-semiconductor interface, which is again strongly influenced by the temperature dependent, characteristic film growth mode.
机译:具有高度可再现的特性的有机薄膜晶体管的制造提出了非常具有挑战性的任务。我们已经使用表面分析工具和方法在超高真空条件下制备并分析了并五苯薄膜晶体管模型。通过并五苯的反复吸附,离解和解吸,用碳有意地污染金触点和SiO2通道区域在创建具有稳定且可重复参数的设备中非常有利。我们主要关注器件性能(例如迁移率和阈值电压)与薄膜形态和制备温度的关系。在300 K时,并五苯显示出Stranski-Krastanov的生长,而在200 K时,发生细颗粒状的层状膜生长,这主要影响阈值电压。与温度有关的迁移率测量结果表明与已建立的多重俘获和释放模型具有良好的一致性,这反过来表明晶粒中以及氧化物-半导体界面处的浅陷阱的主要浓度。作为覆盖率函数的迁移率和阈值电压测量结果表明,多达四个完整的单分子层有助于总体电荷传输。对有效迁移率的显着影响还源于金触点-半导体界面处的接触电阻,该电阻又受温度依赖性,特征膜生长模式的强烈影响。

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