全方位抗过载的压阻式三轴加速度计

摘要

针对加速度计在碰撞中过载失效的问题,提出了一种基于SoI的具有抗过载能力的压阻式三轴集成加速度计.加速度计采用三质量块结构,利用深反应离子刻蚀(DRIE)释放出来的间隙实现横向过载保护,同时利用SoI片,在硅<100>平面上通过KOH腐蚀硅〈110>补偿条形成凸角实现纵向过载保护.封装后的加速度计利用激振台和落锤法进行了测试.测试结果表明:加速度计的三轴灵敏度分别为2.56,2.54,2.05 mV/gn,分辨率分别为0.53,0.87,0.77 mgn,三轴方向均具有超过3000 gn的抗过载能力.%In order to solve the problem that the existing accelerometer is easily damaged due to the lack of anti-overload protection, a triaxial piezoresistive integrated accelerometer based on Sol with three-mass-block is introduced. The lateral anti-overload protection is designed by the interval gap released from the DR1E etching on the silicon film, and the vertical anti-overload protection is developed due to the convex corner that is made from the (110) silicon compensative strips on the ( 100) silicon film by KOH anisotropic etching. The packaged accelerometer is tested by a vibration exciter and a dropping-bar system. The test results show that the sensitivities in the x,y,and z axis are measured to be 2.56,2.54,2.05 mV/gn/3. 3 V,respectively,the resolutions measured to be 0.53,0. 87,0. 77mgo,and also the three axis direction has anti-overload capability over 3000gn.