A nonepitaxial (001) textured Fe-Pt alloyed film was obtained by annealing Fe/Pt multilayers in H2. No such nonepitaxial (001) texture was observed for similar multilayers annealed in N2 atmosphere. Sensitive electron energy loss spectroscopy and the left shift of the L10 FePt (111) diffraction peak indicate oxidation in the N2 annealed samples. The oxidation dramatically degrades the (001) texture of the Fe-Pt film and induces the composition change in the alloyed layer. The relation between the texture formation and oxidation was discussed.
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