20 kV固态Marx脉冲调制器研制

摘要

A 20 kV solid-state Marx pulse modulator is developed.The modulator is com-posed of eight-stage Marx modules in series,each of which adopts two independently con-trolled insulated gate bipolar transistors (ICBTs) for charging and discharging to its energy storage capacitor.It takes high voltage silicon stack for capacitor charging isolation and switch-driven isolation for each stage of the Marx module.With push/pull PCB structure, the Marx modules are easy to maintenance and replacement.Experimental results show that the 20 kV solid-state Marx modulator can generate output pulse with voltage more than 20 kV,pulse width of 10μs,raise/fall time of 300 ns at a load of 20 kΩ.Without strengthen cool,the pulse repetition rate is up to 1 kHz in burst mode.%阐述了20 kV固态Marx脉冲调制器的设计原理、结构特点及驱动控制方法。该系统由8级模块串联而成,每级模块的储能电容、高压充电和固态开关驱动供电均采用高压硅堆隔离,Marx模块采用两只独立控制的高压绝缘栅双极型晶体管(insulated gate bipolar tran-sistor,IGBT)对模块的储能电容实现充电和放电。IGBT 驱动电路采用高压硅堆隔离供电、光纤传输触发脉冲和高性能IGBT驱动模块TD350设计构成。驱动电路具备完善的欠压、过流和过压保护功能。Marx模块采用插拔式结构,维护快捷简便。脉冲源在无强化散热措施条件下,输出方形高压脉冲幅度大于20 kV,脉冲宽度为10μs,脉冲前后沿均为300 ns,重复频率可达1 kHz。