采用激光分子束外延法在蓝宝石衬底上异质外延β-Ga2O3薄膜.研究了氧分压对薄膜表面结构和结晶程度的影响,结果表明β-Ga2O3薄膜的均方根粗糙度和X射线衍射谱峰的半高宽随着氧分压的减小呈现先减小后增大的趋势.并对氧分压为10-2Pa条件下的薄膜进行了光致发光谱、紫外透射谱、禁带宽度变化和拉曼谱的研究,结果显示β-Ga2O3薄膜的带隙随氧分压的减小而不断增大,β-Ga2O3薄膜具有蓝光发光和深紫外高透射特性,是用于光电器件特别是紫外特性氧敏传感器的最佳材料之一.%High-quality β-Ga2O3 films were fabricated on the sapphire substrates at the high vacuum atmosphere by laser molecular beam epitaxy (LMBE). The influence of oxygen partial pressure on surface structure and crystallinity of β-Ga2O2 films was researched. The results indicated that the root-mean-square(RMS) roughness and full width at half maximum(FWHM) of β-Ga2O3 films tended to decrease firstly and then increase with the decreasing of oxygen partial pressure. What s more, photoluminescence spectroscopy, ultraviolet transmission spectrum, bandgap variation and Laman spectrum of β-Ga2O3 film with 10-2Pa oxygen partial pressure were analysed. The results revealed that the bandgap of β-Ga2O3 films had a tendency of increasing with the decreasing of oxygen partial pressure. And β-Ga2O3 film owned the properties of blue-luminescece and high transmission in the deep ultraviolet region, it is one of the best materials for photoelectric devices such as oxygen sensor, and so on.
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