真空预载荷静压气体轴承静态特性研究

摘要

Based on programmable analysis of simulation model of orifice restrictor vacuum pre-load aerostatic bearing by using MATLAB,the effects of the following factors on steady state characteristics of bearing were analyzed,such as the pressure distribution condition of bearings,vacuum chamber area ratio,orifice diameter,the number of orifice and supply gas pressure,etc.The simulation calculation shows that the area ratio of vacuum chamber between 1/6 and 1/3 can get good achievement,and better steady state characteristic can be achieved through adjusting orifice diameter,changing the number of orifice and supply gas pressure when the size of bearing structure is fixed,besides,the stiffness of bearing can be improved with vacuum pre-load.The experiments on the capacity ability of sample were done in experimental platform built.The result shows that the experimental values is consistent with the values of simulation,which further shows the feasibility of vacuum pre-load.%根据真空预载荷原理,运用MATLAB软件对建立的小孔节流真空预载荷静压气体轴承仿真模型进行编程分析,通过仿真计算,分析轴承气膜压力分布情况及真空腔面积比、节流孔径、节流孔个数、供气压力等因素对轴承稳态特性的影响.结果表明:真空腔面积比值在(1/6,1/3)之间选取较佳,在轴承结构尺寸确定的情况下调整节流孔径、节流孔个数以及供气压力,能够得到较好的稳态特性,采用真空预载荷可以提高轴承的刚度.搭建实验平台对加工的样品进行承载能力实验,实验测量值和理论值具有较好的一致性,验证了真空预载荷可行性.