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HYDROSTATIC GAS BEARING, HYDROSTATIC GAS BEARING DEVICE FOR USE IN VACUUM ENVIRONMENT, AND GAS RECOVERING METHOD FOR THE HYDROSTATIC GAS BEARING DEVICE
HYDROSTATIC GAS BEARING, HYDROSTATIC GAS BEARING DEVICE FOR USE IN VACUUM ENVIRONMENT, AND GAS RECOVERING METHOD FOR THE HYDROSTATIC GAS BEARING DEVICE
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机译:静压气体轴承,用于真空环境的静压气体轴承装置以及静压气体轴承装置的气体回收方法
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摘要
In a hydrostatic gas bearing for use in a vacuum, in order to provide a hydrostatic gas bearing in which an increase in the quantity of gas being discharged during the movement of a moving body is reduced, the surface of a guide shaft of a fixed body and/or the surface of the moving body is subjected to processing for reducing adhesion of gas molecules, for example, by coating the surface(s) with a material having a low adhesion probability of gas molecules, by which the quantity of gas being discharged is decreased.
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