MPCVD装置圆柱谐振腔的仿真设计

摘要

A cylindrical resonant cavity working on TE11 mode for microwave plasma chemical vapor deposition (MPCVD) systems is designed on the basis of electromagnetic theory. The expression of the electric field distribution in the cylindrical cavity is derived and the geometrical size of the cylindrical cavity is calculated. The electric field distribution in the cylindrical cavity is simulated by using the electromagnetic software CST. The difference of electric field distribution from different coupling depth of antenna and thickness of quartz window is compared. Through the optimized simulation results, it is proved that the microwave power has a good coupling when the coupling depth of antenna and the thickness of quartz glass are both 5mm, and it can satisfy the requirement of industry. After practical processing, the simulation results shows good agreement the actual system's working condition, plasma chemical vapor deposition system, promote the development%根据电磁场理论设计了用于微波等离子体化学气相沉积系统的TE11模圆柱谐振腔,推导了该谐振腔的电场分布,计算了圆柱腔的几何尺寸.利用电磁场仿真软件CST对圆柱腔内的电场分布进行仿真,比较分析了不同天线耦合深度以及不同石英窗厚度对电场分布的影响.仿真优化结果表明天线耦合深度为5mm、石英窗厚度为5mm时腔内微波耦合良好,能够满足工业要求.实践加工证明仿真结果与真实系统实际工作状态吻合,为圆柱谐振腔微波等离子装置的研制提供了理论指导,提高了研制效率,节约了研制成本.