梳状微谐振器结构参数对模态及谐振频率的影响

摘要

Resonance frequency is one of the important parameters of micro-resonator, the modal and natural frequency were analyzed at different dimensions by ANSYS, and the effect of different supported beam, comb fingers and number of comb fingers on them was investigated. The analysis results show that the length of supported beam, length of comb fingers and number of comb fingers affect the resonance frequency and order of operational modal, and the resonance frequency is largely affected by the length of supported beam, resonance frequency may decrease with the increasing length of supported beam. When design the micro-resonator, the resonance frequency can be changed dramatically by adjusting the length of supported beam, and the resonance frequency trimming can be accomplished by adjusting the length of comb fingers.%谐振频率的大小是设计微谐振器时必须考虑的重要参变量，采用ANSYS有限元仿真软件分析不同结构尺寸下的微谐振器的谐振频率和模态，主要分析支撑梁长度和梳齿参数对微谐振器模态及谐振频率的影响。分析结果表明，支撑梁长度、梳齿长度及梳齿的个数会影响到微谐振器工作模态的阶次和谐振频率的大小。在微谐振器的相关设计时，可通过调整支撑梁的长度显著改变谐振频率，而谐振频率微调可通过梳齿尺寸的微调实现。