气相扩散沉积法绝缘包覆铁镍钼合金粉体工艺优化

摘要

The method of vapour diffusion deposition was used for coating the Fe-Ni-Mo alloy powder with insulation. The metallic silicon was firstly chlorinated to generate trichlorosilane vapour which then was hydrolyzed to form silicon dioxide and consequently the surface of Fe-Ni-Mo based soft magnetic alloy was deposited with a layer of insulation film. The influence of the technological parameters on the coating performance was investigated and the parameters optimized. The result indicates that the optimal flow rates of the argon respectively are 100 and 50 mL/min during the process of deposition and hydrolysation, and the optimal additive amount of zinc chloride and metallic silicon were 3wt% and 4wt%, respectively. Under these conditions of the process, the insulation coating of the Fe-Ni-Mo alloy powder features densification, heat-resistance and high electrical resistivity.%采用气相扩散沉积的方法对铁镍钼合金粉体进行绝缘包覆，金属硅粉先经氯化生成三氯氢硅蒸汽，接着进行水解得到二氧化硅，从而在铁镍钼软磁合金粉体表层沉积形成绝缘膜层。研究了工艺参数对包覆效果的影响并对其进行了优化。结果表明，硅粉沉积和水解过程中氩气最优流速分别为100 mL/min和50 mL/min，最优氯化锌和金属硅粉添加量分别为3wt%和4wt%。在此工艺条件下，铁镍钼软磁合金粉体绝缘包覆层均匀致密且具有耐高温、高电阻率特点。