电子束轰击炉电子枪电子束光学系统结构分析

摘要

对电子束轰击炉电子枪电子束光学系统的结构进行了分析,利用Solidworks对功率为60 kW、加速电压为20 kV的轰击炉电子枪光学系统部分关键结构进行了建模,并对相关参数进行了计算.%The structure of electron optical system of the electron gun in electron-beam bombardment furnace is dissected, and taking electron-beam bombardment furnace with 60 kW power and 20kV accelerating voltage for example, 3D model of the key structure of electron optical system of it is built using solidworks software, correlated parameters of it are calculated simultaneously in paper.