Al2O3感光薄膜的制备及其微细图形化研究

摘要

提出一种利用感光溶胶-凝胶法结合紫外光刻技术制备 Al2 O3微细图形的方法。以 Al (O-Sec-Bu)3为前驱物,β-二酮类配体 H(C10 H12 O2)为化学修饰剂,合成了稳定的、具有良好感光性的含 Al 金属螯合物,进而制备出相应的感光薄膜。研究了薄膜的紫外和红外光谱特性及其在紫外光辐照条件下的变化过程,结果表明金属螯合物薄膜在251,321和368 nm处各存在较强的紫外吸收峰。随着紫外光照时间的增加,吸收峰下降,Al2 O3/H 薄膜表现出明显的感光特性。结合紫外光刻技术,可制备出不同形状尺寸的Al2 O3微细图形,其最小线宽可达437 nm。%In this paper,an novel approach for fabricating Al2 O3 microstructure based on photosensitive sol-gel and UV laser lithography was introduced.Stabilized and UV photosensitive Al-contained metal chelate and thin films were prepared with Al(O-Sec-Bu)3 and H(C10 H12 O2 )as the precursor and chemical modifier,respective-ly.The characteristics of UV and IR spectra of the films and their variations in the process of UV irradiation were investigated.The results showed that the gel films had absorption peaks at about 251,321 and 368 nm due to the formation of chelate complex.These peaks gradually decreased with irradiation in time,which indicated the photosensitive properties of the Al2 O3/H gel films.several size and profile Al2 O3 micro-patterning were fabricated by using UV lithography and the minimum line-size obtained in this paper was about 437 nm.