依据高功率固体激光装置对大口径反射镜附加波前畸变的严格要求,通过选择适合的结构形式、材料及连接方式和支撑位置设计了大口径反射镜支撑结构,并对其进行了优化分析计算和验证性试验.面形精度试验结果表明:装夹引入的附加波前畸变的峰谷值(PV值)约为150nm,小于λ/3(λ-632nm),结构满足设计指标要求.%According to the strict requirement for wavefront distortion of large aperture mirror in high power solid-state la-ser facility, the mirror mount structure was designed by selecting appropriate structure, materials, and location of connections and support. Then its optimization calculation, analysis and confirmatory tests were carried out. Surface accuracy test results show that the peak-valley value of additional wavefront distortion introduced by clamping is about 150 nm, less than A/3 (A = 632 nm). The structure can meet the design requirement.
展开▼
