ICP-MS法同时测定高纯工业品三氯氧磷中28种金属元素

摘要

The method for simultaneous determination Al,Sb,As,Ba,Bi,Cd,Ca,Cr,Co,Cu,Ga,Fe,Pb,Au,Li,Mg,Mn,Hg,Ni,Nb,K,Ag,Na,Sn,Sr,Ti,V and Zn of high purity industrial phosphorus oxychloride was established by inductively coupled plasma mass spectrometry(ICP-MS).The best working conditions of instrument were established.The interference was eliminated by standard addition method and collision reaction pool technology.The detection limit was low(0.004～0.174 μg/L),with high precision(1.0％～5.9％)and good recovery rate(89.0％～115.8％).The method was without complicated pretreatment steps,had good repeatability,high sensitivity,simple operation,was suitable for simultaneous determination of 28 kinds of metal elements in high purity industrial phosphorus oxychloride.%建立了ICP-MS法同时测定高纯工业品三氯氧磷中铝、锑、砷、钡、铋、镉、钙、铬、钴、铜、镓、铁、铅、金、锂、镁、锰、汞、镍、铌、钾、银、钠、锡、锶、钛、钒、锌等28种元素含量的方法.采用标准加入法及碰撞反应池技术消除干扰,确立了最佳测定条件.结果表明检出限低(0.004～0.174 μg/L)、精密度高(1.0％～5.9％)、回收率好(89.0％～115.8％).本方法重复性好、无复杂前处理步骤、灵敏度高、操作简便,完全适用于高纯工业品三氯氧磷中28种金属元素的同时测定.