磨料尺寸对固结金刚石聚集体磨料垫研磨石英玻璃加工性能的影响

摘要

石英玻璃的研磨加工是其超光滑抛光加工的前道工序,对其加工效率和最终表面质量影响甚大.针对石英玻璃的硬脆特性,采用固结金刚石聚集体磨料研磨垫,对其高效低损伤研磨加工工艺进行了研究.探索了金刚石聚集体磨粒的一次颗粒尺寸、二次颗粒尺寸、研磨压力和研磨液流量4因素对研磨石英玻璃加工性能的影响,综合优化得到加工效率高和表面质量优的工艺参数.实验表明:采用固结金刚石聚集体磨料研磨垫,当一次颗粒尺寸和二次颗粒尺寸分别为1.0～2.0 μm和20～25 μm,研磨压力为14 kPa,研磨液流量为60 mL/min时,材料去除率达到2.64 μm/min,平均表面粗糙度值Ra为54.2 nm.%Lapping quartz glass is the former process of its ultra-smooth polishing process,which greatly affects its machining efficiency and final surface quality.To meet the hard and brittle characteristics of the quartz glass,a new fixed diamond aggregation pad (FDAP) was employed to study the high efficiency and low damage lapping process.The effect of original abrasive size,secondary abrasive size,applied load and slurry flow rate on the lapping performance was explored.After comprehensive optimization,the process parameters with high processing efficiency and excellent surface quality were obtained.The results show that the FDAP exhibits an excellent lapping performance.When the original abrasive size and secondary abrasive grain size are 1.0～2.0 μm and 20 ～25 μm respectively,with load 14 kPa and slurry flow rate 60 mL/min,the material removal rate of quartz glass reaches 2.64 μm/min and average surface roughness Ra is 54.2 nm.