CIF格式转换为PG3600格式中任意多边形切割成矩形的算法研究

摘要

This paper presents a novel algorithm for dividing the microlithography patterns of CIF format into rectangles of PG3600 format with emphasis on the division of arbitrary polygon into rectangles.The comparison result of this algorithm with other pattern division algorithms shows its great superiority for ir-regular polygons division over the other algorithms or techniques.%为了编制能够运行于Windows操作系统且又能够挂靠在L-EDIT数据格式转换软件,文章提出了微光刻图形CIF数据格式转换为PG3600数据格式的新的图形切割算法--沿边切割法,重点讨论任意多边形切割成矩形的具体算法,并与其它几种常见的切割算法进行比较,说明该算法对于不规则图形的切割具有明显的优越性,最后给出所编软件运行的实验结果.