原位检测系统中触发式测头的误差分析与补偿

摘要

在分析了原位检测系统中触发式测头误差来源的基础上,提出了自动调整测头偏心的方法,并用标定球对测头的实际作用半径进行了校准。同时,面向实际测量任务,提出了基于在线标定和双线性插值技术的逐点测头半径补偿方法,实验验证,所提出的半径补偿方法比商用软件提供的方法更准确,提高了测量结果的准确性。%On the basis of analysis on the errors from touch trigger probe o{ OMM, a method tocorrect the offset of probe was given, and the actual effective radius o{ probe was calibrated by means of a calibration ball. Oriented to practical measurement task, a new probe radius compensation meth- od based on on--line calibration and bilinear interpolation techniques was presented. The verification experiments of radius compensation show that the accuracy by this method, compared to the method provided by the commercial software, can be much improved.